Applications

The Plasma Enhanced Chemical Vapor Deposition (PECVD) system comprises four key modules: the tube furnace, vacuum acquisition, flow control, and RF power supply. It uses a 13.56Mhz RF output to ionize the gas containing the constituent atoms of the thin film, creating a plasma in the vacuum chamber. By harnessing the enhanced chemical activity of the plasma, the reaction conditions are optimized. This prompts the gases containing the thin film composition to undergo a chemical reaction, thus facilitating a new thin film material growth technology. The end result is the formation of the desired thin film on the substrate. This is particularly effective for the deposition of SiO2 and SiNx thin films under conditions up to 1200°C.

standard features

• The PECVD tube furnace system comprises a tube furnace, vacuum acquisition, flow control, and a radio frequency power supply.
• The tubular furnace provides flexibility with a range of tube diameters and constant temperature zone lengths. Both ends of the furnace tube have stainless steel sealing flanges, with the option of high vacuum or low vacuum flanges.
• Depending on your specific testing needs, the vacuum obtaining system offers a variety of vacuum pumps to choose from. The rotary vane mechanical vacuum pump has a vacuum degree of ≤5pa, while the molecular pump vacuum unit offers a vacuum degree of 1×10^-4pa.
• You have the option to select either a 3-way float manual flowmeter with a range of 60-600ml/min or a 3-way automatic mass flow system with a range of 1-500sccm for the gas supply system.
• Vacuum measurement is performed using either a digital composite vacuum gauge or a Pirani vacuum gauge.
• The ends of the furnace tube are equipped with stainless steel metal flanges, with high-temperature PTFE gaskets, which can work under vacuum, with a vacuum degree ≤5pa (vane vacuum pump).
• There are gas inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the amount of gas intake and exhaust, and can pass in protective gases such as nitrogen, argon, and hydrogen.
• The outer casing of PECVD tube furnace is made of Q235 low carbon steel, featuring electrostatic and corrosion resistance on the surface. It has a sturdy metal frame shell structure, with a low furnace surface temperature.
• The chamber is insulated with alumina ceramic fiber for maximum temperature stability and uniformity, as well as low energy consumption.
• High-quality heating elements provide excellent temperature uniformity, offer fast heat-up and cool-down rates, and ensure unsurpassed temperature uniformity along the entire heated length.
• The temperature control is precise, with minimal temperature fluctuations. It includes temperature compensation and calibration functions, with an accuracy of ±1℃.
• Heating rate: ≤ 25℃/min, a suggested 15℃/min heating rate for a long service life.
• An intelligent microcomputer-based self-tuning PID temperature controller, with SCR/SSR control, can set the heating curve and program 4 groups of 30 segments for program heating, program heat preservation, and program cooling.
• The device features a circuit breaker that trips automatically during a leakage or short circuit, safeguarding both equipment and operators.
• The furnace emits an alarm signal and automatically protects when overheated or when the thermocouple breaks during the working process.
• A variety of tube diameters and heating lengths can be adjusted and customized to accommodate the different physical or chemical requirements of a process.
• Standard configurations: Furnace body -1 set, Thermocouple -1 set, Manual -1 copy, Temperature controller -1 set, High temperature gloves -1 pair, Furnace hook -1 set, Pipe plugs -1 set, Stainless Steel Vacuum Sealing Flange Kit -1 set
• Optional accessories:
  • Optional rotary vane vacuum pump (vacuum degree ≤ 5pa)
  • Optional digital vacuum gauge (1.0×10^5 – 1.0×10^-1pa)
  • Optional float flowmeter (range 60 – 600ml/min)
  • Optional corundum boat
• Quality Certificates: CE, SGS, ISO9001, TUV
• Warranty: one year，life long technical support

technical details(models)

Models	Heating Zone （mm）	Tube Size(mm)	Max temp	Continous temp	Heating element	Voltage/Power
STGP-40-12	300/440	Φ40 x 1200	1200℃	1100℃	HRE	220V/1.8KW
STGP-60-12	300/440	Φ60 x 1200	1200℃	1100℃	HRE	220V/2.6KW
STGP-80-12	300/440	Φ80 x 1200	1200℃	1100℃	HRE	220V/2.6KW
STGP-100-12	300/440	Φ100 x 1200	1200℃	1100℃	HRE	220V/2.6KW
OEM		Any size